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Pearton, S.J.

Hydrogen in Compound Semiconductors

1993 - Trans Tech Publications

546 p.

  • State-of-the-art reviews on all the major areas of interest are brought together in this book, namely the role of hydrogen during epitaxial growth, its entry into the material during processing, its subsequent diffusivity and bonding with dopants, other impurities or defects, its effect on device performance and reliability and positive uses for hydrogen in passivating surfaces. [Publisher's text].
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