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Zhang, Wendong | Chou, Xiujian | Bao, Haifei | Ma, Zongmin | Shi, Tielin

Measurement Technology for Micro-Nanometer Devices

2016 - John Wiley et Sons Ltd.

352 p.

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices [Publisher's Text]

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