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Teo, Selin H.G. | Bourouina, Tarik | Li, Hua. | Liu, Ai Qun.

NEMS/MEMS Technology and Devices - ICMAT2009, ICMAT2009

2009 - Trans Tech Publications

334 p.

Volume is indexed by Thomson Reuters CPCI-S (WoS).This second book on the subject of MEMS covers contemporary topics of importance to science, engineering and the technology of materials. [Publisher's text].

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