MEMS/NEMS Nano Technology

Volume is indexed by Thomson Reuters CPCI-S (WoS).This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro--Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS-NENS and Applications, Nano-Material Research - Nanotubes - Nanowire Devices, Micropower Technology, Theories in Micro--Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology. [Publisher's text].

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