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Hanaizumi, Osamu | Miura, Kenta | Unno, Masafumi

Silicon Science and Advanced Micro-Device Engineering II

2011 - Trans Tech Publications

320 p.

Volume is indexed by Thomson Reuters CPCI-S (WoS).This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter. [Publisher's text].

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