2001 - Trans Tech Publications
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Beam Injection Assessment of Microstructures in Semiconductors
522 p.
The characterisation of semiconductors is of key importance in preparing and applying semiconductors in industry. Volume is indexed by Thomson Reuters CPCI-S (WoS).The present work deals with theoretical and experimental topics which are related to the assessment of microstructures in semiconductors by means of beam injection and related methods. [Publisher's text].
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ISBN: 9783035707045
