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Sekiguchi, Takashi | Tomokage, H.

Beam Injection Assessment of Microstructures in Semiconductors

2001 - Trans Tech Publications

522 p.

The characterisation of semiconductors is of key importance in preparing and applying semiconductors in industry. Volume is indexed by Thomson Reuters CPCI-S (WoS).The present work deals with theoretical and experimental topics which are related to the assessment of microstructures in semiconductors by means of beam injection and related methods. [Publisher's text].

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