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Marek, Juraj | Shoukry, Hamada | Grossner, Ulrike | Pobegen, Gregor

Semiconductor Wafer Fabrication, Coatings and Tribology

2023 - Trans Tech Publications

156 p.

  • The special edition includes articles that represented the latest research results and engineering solutions in the synthesis of nanomaterials, analysis processes of semiconductor wafer fabrication, and some decisions on coatings and exploration of tribological performance of several polymer and composite materials. This special edition will be interesting to specialists in nanomaterials synthesis, semiconductor power device production and protective coatings in machinery. [Publisher's text].
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